Electrical properties and microstructure of vanadium-based...

Semiconductor Science and Technology 2013 / 12 Vol. 28; Iss. 12

Electrical properties and microstructure of vanadium-based contacts on ICP plasma etched n-type AlGaN:Si and GaN:Si surfaces

Lapeyrade, Mickael, Muhin, Anton, Einfeldt, Sven, Zeimer, Ute, Mogilatenko, Anna, Weyers, Markus, Kneissl, Michael
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Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/12/125015
Date:
December, 2013
File:
PDF, 818 KB
english, 2013
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