A surface micromachined thermopile detector array with an...

A surface micromachined thermopile detector array with an interference-based absorber

Wu, H, Emadi, A, Sarro, P M, de Graaf, G, Wolffenbuttel, R F
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/7/074009
Date:
July, 2011
File:
PDF, 383 KB
english, 2011
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