Standard cell design with...

Standard cell design with resolution-enhancement-technique-driven regularly placed contacts and gates

Wong, Alfred K.
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Volume:
4
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.1857529
Date:
January, 2005
File:
PDF, 828 KB
english, 2005
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