Reaction mechanism of polymer removal using wet ozone

Japanese Journal of Applied Physics 2014 / 02 Vol. 53; Iss. 2S

Reaction mechanism of polymer removal using wet ozone

Goto, Yousuke, Angata, Yukihiro, Tsukazaki, Emi, Takahashi, Seiji, Koike, Kunihiko, Yamagishi, Tadaaki, Horibe, Hideo
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.02BB04
Date:
February, 2014
File:
PDF, 333 KB
english, 2014
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