![](/img/cover-not-exists.png)
Design and Fabrication of Bulk Micro-machined, High Resilience, High-Q, High Tilt Angle, Low Driving Voltage, Flexure Beam Micro-mirrors on Mono-crystalline Silicon
Kurhekar, Anil Sudhakar, Apte, P. R., Duttagupta, S. P.Volume:
8
Language:
english
Journal:
Silicon
DOI:
10.1007/s12633-014-9259-2
Date:
January, 2016
File:
PDF, 17.41 MB
english, 2016