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Reflectivity characteristics of high-contrast grating mirrors for small beam spot
Kikuchi, Asako, Miyamoto, TomoyukiVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.08MC02
Date:
August, 2014
File:
PDF, 1.30 MB
english, 2014