The effects of DRIE operational parameters on vertically...

The effects of DRIE operational parameters on vertically aligned micropillar arrays

Miller, Kane, Li, Mingxiao, Walsh, Kevin M, Fu, Xiao-An
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035039
Date:
March, 2013
File:
PDF, 1.46 MB
english, 2013
Conversion to is in progress
Conversion to is failed