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The effects of DRIE operational parameters on vertically aligned micropillar arrays
Miller, Kane, Li, Mingxiao, Walsh, Kevin M, Fu, Xiao-AnVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035039
Date:
March, 2013
File:
PDF, 1.46 MB
english, 2013