Energy Distribution of Ions Incident on Radio-Frequency...

Plasma Science and Technology 2010 / 02 Vol. 12; Iss. 1

Energy Distribution of Ions Incident on Radio-Frequency Biased Electrodes in External Magnetic Field

Xiu, Zou, Xiaobing, Feng, Minghui, Qiu, Jinyuan, Liu, Ye, Gong
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Volume:
12
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/12/1/09
Date:
February, 2010
File:
PDF, 147 KB
english, 2010
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