Wet anisotropic etching for fluidic 1D nanochannels

Wet anisotropic etching for fluidic 1D nanochannels

Haneveld, Jeroen, Jansen, Henri, Berenschot, Erwin, Tas, Niels, Elwenspoek, Miko
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/4/310
Date:
July, 2003
File:
PDF, 639 KB
english, 2003
Conversion to is in progress
Conversion to is failed