Wet anisotropic etching for fluidic 1D nanochannels
Haneveld, Jeroen, Jansen, Henri, Berenschot, Erwin, Tas, Niels, Elwenspoek, MikoVolume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/4/310
Date:
July, 2003
File:
PDF, 639 KB
english, 2003