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The influence of SiN x substrate on crystallinity of μc-Si film used in thin film transistors
Juan, Li, Chun-Ya, Wu, Jian-Ping, Liu, Shu-Yun, Zhao, Zhi-Guo, Meng, Shao-Zhen, Xiong, Li-Zhu, ZhangVolume:
15
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/15/6/033
Date:
June, 2006
File:
PDF, 332 KB
english, 2006