Effect of Hydrogen on Vacancy Formation in Sputtered Cu...

Japanese Journal of Applied Physics 2013 / 04 Vol. 52; Iss. 4R

Effect of Hydrogen on Vacancy Formation in Sputtered Cu Films Studied by Positron Annihilation Spectroscopy

Yabuuchi, Atsushi, Kihara, Teruo, Kubo, Daichi, Mizuno, Masataka, Araki, Hideki, Onishi, Takashi, Shirai, Yasuharu
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.046501
Date:
April, 2013
File:
PDF, 2.03 MB
english, 2013
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