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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A 7ppm, 6°/hr frequency-output MEMS gyroscope
Izyumin, Igor I., Kline, Mitchell H., Yeh, Yu-Ching, Eminoglu, Burak, Ahn, Chae Hyuck, Hong, Vu A., Yang, Yushi, Ng, Eldwin J., Kenny, Thomas W., Boser, Bernhard E.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050879
File:
PDF, 1.24 MB
english, 2015