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Integrated films of transition metal oxides for information technology
Demkov, Alexander A., Ponath, Patrick, Fredrickson, Kurt, Posadas, Agham B., McDaniel, Martin D., Ngo, Thong Q., Ekerdt, John G.Volume:
147
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.04.090
Date:
November, 2015
File:
PDF, 1.17 MB
english, 2015