Sensitivity enhancement of a microcantilever based DC...

Measurement Science and Technology 2014 / 12 Vol. 25; Iss. 12

Sensitivity enhancement of a microcantilever based DC current sensor by using its torsional modes

Zhang, Guiming, Zhao, Libo, Jiang, Zhuangde, Xu, Longqi, Hu, Yingjie, Zhao, Yulong, Liu, Zhigang
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Volume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/12/125108
Date:
December, 2014
File:
PDF, 1.28 MB
english, 2014
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