Design and characterization of a 3D MEMS VOA driven by...

Journal of Micromechanics and Microengineering 2012 / 10 Vol. 22; Iss. 10

Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

Koh, Kah How, Qian, You, Lee, Chengkuo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/10/105031
Date:
October, 2012
File:
PDF, 2.26 MB
english, 2012
Conversion to is in progress
Conversion to is failed