Photoluminescence Study of Damage Introduced in GaN by Ar-...

MRS Proceedings 2011 / 1 Vol. 1396

Photoluminescence Study of Damage Introduced in GaN by Ar- and Kr-Plasmas Etching

Nakano, Yoshitaka, Kawakami, Retsuo, Niibe, Masahito, Takeichi, Atsushi, Inaoka, Takeshi, Tominaga, Kikuo
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Volume:
1396
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1533
Date:
January, 2011
File:
PDF, 852 KB
english, 2011
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