Structural Investigation on the Nature of Surface Defects...

Materials Science Forum 2000 Vol. 338-342

Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

Shamsuzzoha, M., Saddow, Stephen E., Schattner, T.E., Jin, Li, Dudley, Michael, Rendakova, S.V., Dmitriev, Vladimir
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Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.453
File:
PDF, 507 KB
2000
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