Evidence of GeO volatilization and its effect on the...

Chinese Physics B 2013 / 03 Vol. 22; Iss. 3

Evidence of GeO volatilization and its effect on the characteristics of HfO 2 grown on a Ge substrate

Fan, Ji-Bin, Liu, Hong-Xia, Fei, Cheng-Xi, Ma, Fei, Fan, Xiao-Jiao, Hao, Yue
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Volume:
22
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/22/3/037702
Date:
March, 2013
File:
PDF, 178 KB
english, 2013
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