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Characterization of a modular broad beam ion source
Zeuner, Michael, Neumann, Horst, Scholze, Frank, Flamm, Dieter, Tartz, Michael, Bigl, FriederVolume:
7
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/7/3/003
Date:
August, 1998
File:
PDF, 196 KB
english, 1998