![](/img/cover-not-exists.png)
Annealing effect on electrical properties of high- k MgZnO film on silicon
Liang, Jun, Wu, Huizhen, Chen, Naibo, Xu, TianningVolume:
20
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/20/5/l01
Date:
May, 2005
File:
PDF, 254 KB
english, 2005