Annealing effect on electrical properties of high-...

Semiconductor Science and Technology 2005 / 05 Vol. 20; Iss. 5

Annealing effect on electrical properties of high- k MgZnO film on silicon

Liang, Jun, Wu, Huizhen, Chen, Naibo, Xu, Tianning
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
20
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/20/5/l01
Date:
May, 2005
File:
PDF, 254 KB
english, 2005
Conversion to is in progress
Conversion to is failed