Manufacturing of TFTs with High Deposition Rated Microcrystalline Silicon using Plasma Enhanced Chemical Vapor Deposition
Park, Kyung-Bae, Jung, Ji-Sim, Kim, Jong-Man, Ryu, Myung-kwan, Lee, Sang-Yoon, Kwon, Jang-YeonVolume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A17-02
Date:
January, 2007
File:
PDF, 413 KB
english, 2007