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Multi-layer SU-8 lift-off technology for microfluidic devices
Bohl, Benjamin, Steger, Reinhard, Zengerle, Roland, Koltay, PeterVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/6/002
Date:
June, 2005
File:
PDF, 1.44 MB
english, 2005