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Investigation of the lateral spread of erbium ions implanted in silicon crystal
Qin, Xi-Feng, Chen, Ming, Wang, Xue-Lin, Liang, Yi, Zhang, Shao-MeiVolume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/11/113403
Date:
November, 2010
File:
PDF, 378 KB
english, 2010