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Design and measurement of a piezoresistive ultrasonic sensor based on MEMS
Yu, Jiaqi, He, Changde, Yuan, Kejing, Lian, Deqin, Xue, Chenyang, Zhang, WendongVolume:
34
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/34/7/074013
Date:
July, 2013
File:
PDF, 1.55 MB
english, 2013