Effect of pad surface micro-texture on dishing and erosion...

Japanese Journal of Applied Physics 2014 / 08 Vol. 53; Iss. 8

Effect of pad surface micro-texture on dishing and erosion during shallow trench isolation chemical mechanical planarization

Liao, Xiaoyan, Zhuang, Yun, Borucki, Leonard J., Cheng, Jiang, Theng, Siannie, Ashizawa, Toranosuke, Philipossian, Ara
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.086501
Date:
August, 2014
File:
PDF, 1.46 MB
english, 2014
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