SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Micromachining of ultrananocrystalline diamond
Moldovan, Nicolai A., Auciello, Orlando H., Sumant, Anirudha, Carlisle, John, Divan, Ralu, Gruen, Dieter M., Krauss, Alan R., Mancini, Derrick C., Jayatissa, A., Tucek, John, Karam, Jean Michel, YasaiVolume:
4557
Year:
2001
Language:
english
DOI:
10.1117/12.442958
File:
PDF, 1.42 MB
english, 2001