Effect of pulsed electric fields on dielectric breakdown in...

Applied Physics Express 2015 / 03 Vol. 8; Iss. 3

Effect of pulsed electric fields on dielectric breakdown in Cu damascene interconnects

Yeon, Han-Wool, Song, Jun-Young, Lim, Seung-Min, Bae, Jang-Yong, Hwang, Yuchul, Joo, Young-Chang
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Volume:
8
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.8.031502
Date:
March, 2015
File:
PDF, 818 KB
english, 2015
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