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Microlinear Motion Bearing Produced by Anisotropic Etching of Silicon
Nobuyuki Moronuki, Yuji FurukawaVolume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)60796-3
File:
PDF, 1.43 MB
english, 1997