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The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells
Yong-Sheng, Chen, Jian-Hua, Wang, Jing-Xiao, Lu, Wen, Zheng, Jin-Hua, Gu, Shi-E, Yang, Xiao-Yong, Gao, Xue-Jun, Guo, Shang-Li, Zhao, Zhe, GaoVolume:
17
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/17/9/054
Date:
September, 2008
File:
PDF, 142 KB
english, 2008