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Rigid XYθ Table for Ultraprecision Machine Tool Driven by Means of Walking Drive
Eiji Shamoto, Toshimichi MoriwakiVolume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)60830-0
File:
PDF, 382 KB
english, 1997