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A Linear Piezomotor of High Stiffness and Nanometer Resolution
Bi Zhang, Zhenqi Zhu, Bolin Zhang, Wei-En Fu, Jiexin WangVolume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)60831-2
File:
PDF, 800 KB
english, 1997