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Development of a Traceable Laser-Based Displacement Calibration System with Nanometer Accuracy
S.F.C.L. Wetzels, P.H.J. SchellekensVolume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)60870-1
File:
PDF, 298 KB
english, 1997