Effect of Al substrate nitridation on the properties of AlN films grown by pulsed laser deposition and its mechanism
Wang, Wenliang, Qian, Huirong, Yang, Weijia, Wang, Haiyan, Zhu, Yunnong, Li, GuoqiangVolume:
644
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2015.05.032
Date:
September, 2015
File:
PDF, 1.59 MB
english, 2015