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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Plasma Assisted Low-Temperature Hydrophobic Wafer Bonding
Breninford, Michael P., Bailey, David, Ikram, Hamid, Colinge, C. A., Holl, SusanVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357068
File:
PDF, 94 KB
english, 2006