Gaseous Impurities in Co Silicidation: Impact and Solutions

Journal of The Electrochemical Society 2001 Vol. 148; Iss. 6

Gaseous Impurities in Co Silicidation: Impact and Solutions

Li, Hua, Vereecke, Guy, Maex, Karen, Froyen, Ludo
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Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1372213
File:
PDF, 242 KB
english, 2001
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