SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Micromachining and Microfabrication Process Technology VII - Planarization of deep trenches

Rusu, Cristina R., Klaasse, Gerard, Sedky, Sherif, Esch, Heleen, Parmentier, Brigitte, Verbist, Agnes, Witvrouw, Ann, Karam, Jean Michel, Yasaitis, John A.
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Volume:
4557
Year:
2001
Language:
english
DOI:
10.1117/12.442970
File:
PDF, 1.19 MB
english, 2001
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