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Polyimide as a versatile enabling material for microsystems fabrication: surface micromachining and electrodeposited nanowires integration
Walewyns, Thomas, Reckinger, Nicolas, Ryelandt, Sophie, Pardoen, Thomas, Raskin, Jean-Pierre, Francis, Laurent AVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/9/095021
Date:
September, 2013
File:
PDF, 634 KB
english, 2013