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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 1 February 2014)] Photonic and Phononic Properties of Engineered Nanostructures IV - Mechanical-free optical technology for nanostructures inspection

Adibi, Ali, Lin, Shawn-Yu, Scherer, Axel, Ryabko, Maxim V., Koptyaev, Sergey N., Shcherbakov, Alexander V., Lantsov, Alexey D., Oh, Sangyoon
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Volume:
8994
Year:
2014
Language:
english
DOI:
10.1117/12.2036504
File:
PDF, 710 KB
english, 2014
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