Key Technologies for FeRAM Backend Module

MRS Proceedings 2009 / 1 Vol. 1160

Key Technologies for FeRAM Backend Module

Ren, Tian-Ling, Zhang, Ming-Ming, Jia, Ze, Wang, Lin-Kai, Wei, Chao-Gang, Xue, Kan-Hao, Zhang, Ying-Jie, Hu, Hong, Xie, Dan, Liu, Li-Tian
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Volume:
1160
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1160-H08-01
Date:
January, 2009
File:
PDF, 957 KB
english, 2009
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