The Tuned Substrate Self-bias in a Radio-frequency Inductively Coupled Plasma
Zhenfeng, Ding, Weigang, Huo, Younian, WangVolume:
6
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/6/6/007
Date:
December, 2004
File:
PDF, 603 KB
english, 2004