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Characteristics of a 13.56 MHz radiofrequency-driven multicusp ion source
Boonyawan, D, Chiraphatpimol, N, Vilaithong, TVolume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/4/305
Date:
November, 2002
File:
PDF, 431 KB
english, 2002