Ultra-thin α-SiN x...

Chinese Physics B 2009 / 04 Vol. 18; Iss. 4

Ultra-thin α-SiN x protective overcoats for hard disks and read/write heads

Wan-Yu, Ding, Jun, Xu, Wen-Qi, Lu, Xin-Lu, Deng, Chuang, Dong
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Volume:
18
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/18/4/046
Date:
April, 2009
File:
PDF, 336 KB
english, 2009
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