Temperature Measurement of Si Substrate Using Optical-Fiber-Type Low-Coherence Interferometry Employing Supercontinuum Light
Hiraoka, Takehiro, Ohta, Takayuki, Kageyama, Tetsunori, Ito, Masafumi, Nishizawa, Norihiko, Hori, MasaruVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.026602
Date:
February, 2013
File:
PDF, 1.13 MB
english, 2013