![](/img/cover-not-exists.png)
Grazing Incidence Interferometry for High Precision Measurements of Cylindrical Form Deviations
A. Weckenmann, J. Bruning, S. Patterson, P. Knight, J. BryanVolume:
50
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)62145-3
File:
PDF, 1.20 MB
english, 2001