25 nm pitch comparison between a traceable x-ray...

Measurement Science and Technology 2012 / 01 Vol. 23; Iss. 1

25 nm pitch comparison between a traceable x-ray diffractometer and a metrological atomic force microscope

Misumi, Ichiko, Kitta, Jun-ichiro, Fujimoto, Hiroyuki, Gonda, Satoshi, Azuma, Yasushi, Maeda, Keisuke, Kurosawa, Tomizo, Ito, Yoshiyasu, Omote, Kazuhiko, Nakayama, Yoshinori, Kawada, Hiroki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/1/015002
Date:
January, 2012
File:
PDF, 1.30 MB
english, 2012
Conversion to is in progress
Conversion to is failed