A method to determine the interface position and layer...

Metrologia 2010 / 06 Vol. 47; Iss. 3

A method to determine the interface position and layer thickness in SIMS depth profiling of multilayer films

Kim, Kyung Joong, Jang, Jong Shik, Moon, Dae Won, Kang, Hee Jae
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Volume:
47
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/47/3/016
Date:
June, 2010
File:
PDF, 723 KB
english, 2010
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