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Mass spectrometric measurements in inductively coupled CF 4 /Ar plasmas
Rao, M V V S, Sharma, S P, Meyyappan, MVolume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/4/306
Date:
November, 2002
File:
PDF, 194 KB
english, 2002