Nanometer Measurement of Silicon Wafer Surface Texture...

CIRP Annals - Manufacturing Technology 1995 Vol. 44; Iss. 1

Nanometer Measurement of Silicon Wafer Surface Texture Based on Fraunhofer Diffraction Pattern

Takashi Miyoshi, Yasuhiro Takaya, Katsumasa Saito
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Volume:
44
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/s0007-8506(07)62369-5
File:
PDF, 765 KB
english, 1995
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