High-permittivity metal-insulator-metal capacitors with...

IOP Conference Series Materials Science and Engineering 2010 / 02 Vol. 8

High-permittivity metal-insulator-metal capacitors with TiO 2 rutile dielectric and RuO 2 bottom electrode

Hudec, B, Husekova, K, Dobrocka, E, Lalinsky, T, Aarik, J, Aidla, A, Frohlich, K
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Volume:
8
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/8/1/012024
Date:
February, 2010
File:
PDF, 507 KB
english, 2010
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