![](/img/cover-not-exists.png)
The effect of nitrogen doping on the elastic modulus and hardness of 3C-SiC thin films deposited using methyltrichlorosilane
H K E, Latha, Udayakumar, A, Siddeswara Prasad, VVolume:
1
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/1/1/015902
Date:
January, 2014
File:
PDF, 297 KB
english, 2014